G-Sapphire H series Ozone Generator





Unique coating on double-quartzozone generation tubes

Pure oxygen feed-gas prevent (NO)x formation

Human Machine Interface (HMI)

Programmable Logical Controller (PLC)

Remote control capability

Ozone output adjustable and display

Gas pressure display and alarm

Water temperature display and alarm

Ozone concentration display and control


Wafer cleaning

Photoresist strip

Surface conditioning and cleaning

CVD processing


Purified water treatment





What is G-Sapphire H series ozone generator?


The G-Sapphire H series ozone generator is designed to fulfill the semiconductor applications that demand high ozone concentration, ultra clean ozone and extremely reliable performance. The ozone is produced from moduled ozone generation units. Each unit is consisted of ozone generation tube with the double quartz tubes design and individual high power supply system. The ozone is formed between the surfaces of two quartz tubes to be free from metallic contact through the whole ozone generation process. The ozone concentration ranges from 14% to 21% by weight depending on the oxygen flow rate. In addition, the only feed-gas is pure oxygen, the purity can be up to 99.99%, to eliminate contamination. The display/control and interface are Human Machine Interface (HMI) with Programmable Logic Controller (PLC), which give many flexible features such as interfacing with sensors, detectors and alarms for various applications.





[Technical Information]