|
G-Sapphire H series Ozone Generator |
|
|
|
Features:
■ Unique coating on double-quartzozone generation tubes ■ Pure oxygen feed-gas prevent (NO)x formation ■ Human Machine Interface (HMI) ■ Programmable Logical Controller (PLC) ■ Remote control capability ■ Ozone output adjustable and display ■ Gas pressure display and alarm ■ Water temperature display and alarm ■ Ozone concentration display and control |
Applications: ■ Wafer cleaning ■ Photoresist strip ■ Surface conditioning and cleaning ■ CVD processing ■ Oxidation ■ Purified water treatment
|
|
What is G-Sapphire H series ozone generator? |
|
|
The G-Sapphire H series ozone generator is designed to fulfill the semiconductor applications that demand high ozone concentration, ultra clean ozone and extremely reliable performance. The ozone is produced from moduled ozone generation units. Each unit is consisted of ozone generation tube with the double quartz tubes design and individual high power supply system. The ozone is formed between the surfaces of two quartz tubes to be free from metallic contact through the whole ozone generation process. The ozone concentration ranges from 14% to 21% by weight depending on the oxygen flow rate. In addition, the only feed-gas is pure oxygen, the purity can be up to 99.99%, to eliminate contamination. The display/control and interface are Human Machine Interface (HMI) with Programmable Logic Controller (PLC), which give many flexible features such as interfacing with sensors, detectors and alarms for various applications. |
