OWUCS-S-N

OWUCS-S

OWUCS-S-T

OWUCS-H*

 Dimensions (mm)

 700 x 1100 x 1940

 700 x 1100 x 1940

 800 x 1100 x 1940

 600 x 1100 x 1900

 Weight (kg)

 420

 450

 650

 400

 Feed gas 

 Oxygen (99.99%)

 Oxygen (99.99%)

 Oxygen (99.99%)

 Oxygen (99.99%)

 Oxygen flow rate (l/min)

 8-18 

 8-18

 8-24

 8-24

 Cooling method

 Water cooled

 Water cooled

 Water cooled

 Water cooled

 UPW flow rate (l/min)

 10-50

 10-50

 10-50

 10-50

 Ozonated water concentration (ppm)

 10-35

 15-45

 30-60

 60-13

 Power consumption (kW)

 2.5

 5.0

 10.0

 2.5

 Power supply

 220-240 V, 50/60 Hz, single phase

 Certified

 CE and SEMI S2/S8

 Ambient conditions

 a. Ambient temperature: 5-25℃

 b. Humidity: Max. 80% (Not exceed 50% at 40℃)